Key Glass Types Used in Through Glass Vias (TGV)

Key Glass Types Used in Through Glass Vias (TGV)

Table of Contents

What types of glass are used in TGV? What are the differences? Types of glass used in TGV:

Generally, there are three types: alkali-free glass, borosilicate glass, and quartz.

Alkali-Free Glass
Based on silicate glass, but with Na⁺, K⁺ and other alkali metal ions removed.
Main components: SiO₂ + Al₂O₃ + B₂O₃ + BaO, etc.
Brittle, poor resistance to mechanical impact.

Borosilicate Glass
Mainly composed of SiO₂ + B₂O₃, with small amounts of Na₂O, K₂O, Al₂O₃.
High transparency, suitable for laser drilling, currently the most widely used TGV material.

Quartz Glass
Almost pure SiO₂ (>99.9%), can be natural fused quartz or synthetic fused quartz.
Excellent performance but difficult to process and expensive.

Comparison of properties and applications:

Characteristics / Glass TypeAlkali-Free GlassBorosilicate GlassQuartz Glass
SiO₂ ContentMedium to HighMediumHighest
CTE (Coefficient of Thermal Expansion)~3.5–4.5 ppm/°C~3.3–3.8 ppm/°C~0.5 ppm/°C
Laser ProcessabilityGoodVery GoodVery Poor
Dielectric PropertiesExcellentGoodSuperior
CostMedium-HighLowHighest
Processing DifficultyMediumLowHigh
ApplicationsHigh-frequency packaging, RDLGeneral packagingHigh-end optoelectronics, MEMS

Related:

  1. Exploring Quartz Applications in Semiconductor Devices
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