01
What is electronic-grade ammonia water?
Electronic-grade ammonia water is essentially a highly purified aqueous solution of ammonium hydroxide (NH₄OH), also known as ultra-high-purity ammonia water. It is a strongly alkaline, transparent liquid formed by dissolving ammonia gas (NH₃) in ultrapure water at a specific ratio. Its key difference from regular industrial ammonia water lies in its ultra-high purity, extremely low metal ion impurities, and minimal organic residues. It is specifically used in high-tech fields such as semiconductors, display panels, and photovoltaics.
02
Functions and Application Scenarios of Electronic-Grade Ammonia Water
Electronic-grade ammonia water is not just a “single cleaning agent”—it plays critical roles in multiple key processes:
✅ 1. Wafer Cleaning (Main Function)
In integrated circuit manufacturing, wafer surfaces must be thoroughly cleaned after each process step to remove particles, metal ions, organic residues, and other contaminants.
Electronic-grade ammonia water is usually mixed with hydrogen peroxide (H₂O₂) and ultrapure water (UPW) to form the SC-1 (Standard Cleaning Solution) formula:
SC-1 = NH₄OH + H₂O₂ + H₂O
Uses:
- Removes inorganic particles and metal ions
- “Strips” contaminants without damaging the wafer surface
✅ 2. Etching Process
Ammonia water has certain chemical activity and can participate in the selective etching of some metal oxides, particularly aiding in the post-cleaning micro-etching phase.
✅ 3. Surface Treatment in Display Panel and Photovoltaic Manufacturing
Electronic-grade ammonia water is also widely used in the process of TFT-LCD and OLED panel production, as well as in the cleaning and surface modification of silicon wafers in photovoltaic manufacturing.
03
Why Is the Threshold for Electronic-Grade Ammonia Water So High?
🧪 1. Ultra-High Purity Requirement (Key Point)
In IC manufacturing, even metal impurities at the 1 ppb (parts per billion) level may affect device performance or reliability. Therefore, electronic-grade ammonia water must meet:
- Metal ion impurities (Fe, Na, K, Ca, Cu, etc.): ≤ ppt to ppb level
- Total organic carbon (TOC): ≤ 50 ppb
- Particle density D50 ≤ 0.1 μm, < several hundred/ml
- Precise control of conductivity and resistivity (typically around 18 MΩ·cm)
🧪 2. Clean Preparation and Storage Process
- Equipment must be made of materials free from metal ion contamination
- The process environment must reach Class 100 or higher cleanliness levels
- Transport requires specialized lined packaging to prevent secondary contamination
04
Market Demand and Industry Status
Market Size
Electronic-grade ammonia water is one of the major products among wet electronic chemicals.
- Global demand exceeded 300,000 tons in 2022
- Largest application fields: NAND Flash, DRAM, logic chips
- Annual compound growth rate: approx. 5–7%
Domestic vs. International Comparison
| Overseas Leading Enterprises | Domestic Enterprises |
|---|---|
| Mitsubishi Chemical, Sumitomo Chemical, BASF (mass production of G5-grade) | Lens Technology, Jianghua Micro, Crystal Clear Electronics, Hengshen Group, etc. (mainstream G2~G3-grade) |
| High product purity, suitable for advanced processes (5nm/3nm) | Medium to high purity, some products approaching G4 |
| High-end market dominance | Accelerated substitution in mid- and low-end markets |
05
Technical Grades and Moore’s Law
In advanced nodes (e.g., below 7nm), chip structures are finer and processes more complex, requiring enhanced cleaning standards. Purity is categorized by G levels:
| Grade | Purity/Contamination Control Ability | Applicable Nodes |
|---|---|---|
| G2/G3 | Mainstream domestic, suitable for 28nm~65nm processes | Mid-to-low-end logic/analog circuits |
| G4/G5 | Mainstream imports, suitable for 7nm~14nm | High-end CPUs, GPUs, etc. |
To support the shrinking linewidths under Moore’s Law, the purity of wet electronic chemicals must reach the next level.
06
Customer Verification Process (Long Cycle, High Threshold)
Supplying electronic-grade ammonia water is not “supply and use”—it must undergo a rigorous customer verification process to ensure complete compatibility with customer processes:
- Customer expresses verification intent, receives initial quote
- Supplier provides COA (Certificate of Analysis) and samples for preliminary testing
- Customer initiates internal project, sets up verification plan
- Online verification begins, often requires multiple sample rounds
- Customer audits supplier onsite (quality/cleanliness/management systems)
- If non-compliant, project is closed; if approved, notification is issued
- Business negotiation, pricing, and formal supply chain relationship establishment
⏳ The entire verification cycle takes 6–18 months, especially for international IDM giants with stringent supplier requirements.
07
Core Process: Physical Purification + Blending Technology
Main physical purification methods include:
- Multi-stage reverse osmosis (RO)
- Degassing and CO₂ removal
- Ultrafiltration
- Ion exchange (IX)
- Distillation (high-precision separation)
Only by combining these processes can ammonia water that meets electronic-grade standards be produced.
08
Importance of Short Transportation Radius
Due to its high corrosiveness and ultra-high purity, ammonia water easily absorbs impurities and CO₂ during storage and transportation:
- Poor product stability, short shelf life (usually 1–3 months)
- Strong corrosiveness, requires special packaging and transport vehicles
- Local supply reduces transportation costs and quality fluctuations
This is why many electronic chemical suppliers set up “on-site supply points” or chemical distribution centers near chip manufacturing plants.
09
Conclusion
Electronic-grade ammonia water is an irreplaceable foundational cleaning chemical in the semiconductor industry. Its quality and purity directly impact chip yield and reliability. In the face of technological demands from advanced processes, upgrading electronic-grade ammonia water is not only a challenge for materials companies but also a key link in achieving domestic semiconductor supply chain independence and control.
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