What quartz components are commonly used in furnace tube equipment, besides furnace tubes, and what are the other applications?
Properties of quartz:
- Low coefficient of thermal expansion—quartz undergoes minimal volume change with temperature variations.
- High purity: low-end w(SiO2) ≥ 99.9% (3N), mid-range w(SiO2) ≥ 99.99% (4N), mid-high-end w(SiO2) ≥ 99.995% (4N5), high-end w(SiO2) ≥ 99.998% (4N8).
- High temperature resistance—can be used in high-temperature environments without easily deforming or cracking.
- Chemically stable—not prone to reacting with acids or bases.
- Excellent insulation.
- Good light transmission and mechanical strength.
Quartz processing procedure:
Quartz ore ⇒ Quartz sand ⇒ Quartz tubes, rods, ingots ⇒ Quartz parts
Quartz sand comes from three sources:
- Natural quartz
- Rock crystal
- Synthetic quartz
Applications of quartz in semiconductor equipment:
Quartz components are used in processes such as epitaxy, lithography, diffusion, oxidation, cleaning, CVD, RTP, PVD, and etching.
Main components include:
- Quartz furnace tubes—zones where wafers undergo high-temperature heating
- Quartz boats
- Quartz rings
- Quartz baskets
- Quartz crucibles
etc.
Disclaimer:
- This channel does not make any representations or warranties regarding the availability, accuracy, timeliness, effectiveness, or completeness of any information posted. It hereby disclaims any liability or consequences arising from the use of the information.
- This channel is non-commercial and non-profit. The re-posted content does not signify endorsement of its views or responsibility for its authenticity. It does not intend to constitute any other guidance. This channel is not liable for any inaccuracies or errors in the re-posted or published information, directly or indirectly.
- Some data, materials, text, images, etc., used in this channel are sourced from the internet, and all reposts are duly credited to their sources. If you discover any work that infringes on your intellectual property rights or personal legal interests, please contact us, and we will promptly modify or remove it.
