Why Are Semiconductor Wafers Tilted in Implantation?
Tilting wafers during ion implantation helps prevent ion channeling, ensuring accurate placement and consistent dopant depth control.
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Tilting wafers during ion implantation helps prevent ion channeling, ensuring accurate placement and consistent dopant depth control.
ECO, or Engineering Change Order, refers to design changes made during or after the wafer tape-out phase to correct issues.
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